HYESUNG Tech Co., Ltd. is doing its major business that is turbo pump repair in addition to the purchase of used turbo pump and sales of refurbished turbo pump for the semiconductor equipment.

HYESUNGTechsets focus on professional maintenance and repair service of any vacuum pumps, especially the most major global brands of TMP repair. And HYESUNG Tech is providing direct service of turbo pump sales mainly used for semiconductor equipment.

And HYESUNGTech is expanding its professional repair service to TMP Controller repair service that repairs almost all of the major global brands and products.

HYESUNGTECH deals the major global brands of TMP Controller for maintenance and repair:
The TMP Controller products that HYESUNG Tech can provide the maintenance and repair service are RF Generator, Power Supply, Vacuum Gauge, Helium Leak Detector and Flow Controller.

■RF Generator:
 AE MDX SPARC-LE HR CHOPPER, AE PEI' 10K RF GENERATOR, AE REG1250, AE RFG2000 2V, AE RFG3000, AE RFG3001, AE ASPECT5013, AE RFXI15500, AE RFG3000, AE RFG3001
 ENI OEM12A RF GENERATOR, ENI OEM25B RF GENERATOR, ENI GHW-50 SERIES RE GENERATOR, ENI ACG SERIES RF GENERATOR
 KYOSAN RF GENERATOR RFK3OZCPS1 3KW, JFKSOZD TE2 5KW, RFK100ZD WT1, KYOSAN MATCHING BOX
 AD-TEC RF PLASMA GENERATOR AX-100011, AXS000W, AX-20000111, AX-10000W AKT, AX-15000W AKT
 HUTTINGER RF GENERATOR 1.6KW
 RFPP LF-5
 COMDEL CLF5000
 MBK50-P52 RE GENERATOR AUTO MATCHING BOX

■Power Supply:
 MKN-152-3S4-PS MICROWAVE
 PFEIFFER TCPO40
 OMRON BH100PCW
 METAL HALIDE LAMP
 APPLIED MATERIALS 24V DC
 FUSION LIGHT HAMMER UV, FUSION P300MQ
 AE PINNACLE 8/15KW, AE PINNACLE 10/12KW, AE MDX L-12M
 UV POWER SUPPLY
 KYOSAN HPK15 DC, HV LAMP
 BERTAN HIGH VOLTAGE POWER SUPPLY
 GUSTAV KLEIN, DELTRON
 SIEMENS, PLUS POWER SUPPLY SL10

■Vacuum Gauge:
 IMR265, TPR265, PKR251, IKR251, MPG400
 TPG262 GAUGE CONTROLLER, TPG300 GAUGE CONTROLLER
 IMG300 GAUGE CONTROLLER

■Helium Leak Detector:
 ULVAC HELIUM LEAK DETECTOR
 HELEN HELIUM LEAK DETECTOR
 PFEIFFER HELIUM LEAK DETECTOR
 ADIXEN(ALCATEL) HELIUM LEAK DETECTOR
 LEYBOLD HELIUM LEAK DETECTOR

■Flow Controller:
 ENTEGRIS FLOW CONTROLLER
 MALEMA FLOW CONTROLLER
 BROOKS(CELERITY) FLOW CONTROLLER
 PARKER FLOW CONTROLLER
 HORIBA FLOW CONTROLLER